Semiconductor Engineering

Reducing Rework In CMP: An Enhanced Machine Learning-Based Hybrid Metrology Approach

The semiconductor industry is constantly marching toward thinner films and complex geometries with smaller dimensions, as well as newer materials. The number of chemical mechanical planarization (CMP) ...
EDN

Nova claims CMP measurement machine is fastest

REHOVOTH, Israel — The NovaScan 3060, from Nova Measuring Instruments Ltd., is a measurement system for chemical mechanical polishing (CMP) applications with an overall measurement time of 13 seconds ...
Benzinga.com

Chemical Mechanical Polishing Machine (CMP) Industry Overview: By Market Trends and Market Dynamics forecasted from 2023 to 2030 with a projected CAGR of 11.7% every year

This "Chemical Mechanical Polishing Machine (CMP) Market" study analyses the market and offers thorough insights to help with difficulties and this report consists of 139 pages. The Chemical ...
EDN

CMP foundry expands services, capacity

SAN JOSE, Calif. &#151 Entrepix Inc., a provider of chemical mechanical polishing (CMP) foundry and equipment services, is taking its business model to the next level. Entrepix (Tempe, Ariz.), ...
Electronic Design

Make the Move to Machine Learning, Neural Networks for CMP Modeling

Use of machine learning and feed-forward neural networks presents a new and exciting opportunity to develop high-accuracy CMP models of complex, advanced deposition processes. Machine learning (ML), ...