There are still some problems to work out, such as cutting defect rates, but directed self-assembly has the potential to reduce the total number of masks. The upcoming 7nm process node presents tough ...
Imec has demonstrated the capability of directed self-assembly (DSA) to pattern line/spaces with a pitch as small as 18nm, using a high-chi block copolymer (high-χ BCP) based process under high volume ...
Through microphase separation, block copolymers (BCPs) can self-assemble into highly uniform, chemically distinct, periodic domains with dimensions and periods at scales of 3–200 nm 1,2 that are ...
The European Commission has taken a consequential step in the early enforcement of the Digital Services Act (DSA). On 5 December 2025, the Commission imposed a €120 million fine on X (formerly Twitter ...
(Nanowerk News) Imec and Tokyo Electron (TEL) announce that they will accelerate their Directed Self-Assembly (DSA) activities at imec’s recent 300 mm fab-compatible DSA process line. Over the past ...
European law requires large platforms to offer alternative feeds.
At last year’s SPIE Advanced Lithography conference, Christopher Bencher, a member of the technical staff at Applied Materials, said the buzz surrounding directed self-assembly (DSA) technology ...
Some results have been hidden because they may be inaccessible to you
Show inaccessible results