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After more than a decade of research and development, Tokyo Electron Miyagi Ltd. has introduced an innovative semiconductor etching method that achieves etch rates up to five times faster than ...

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Abstract: Advanced packaging is the growth engine of the semiconductor industry. In this work, we summarized the current progress of the plasma etching technology used in the advanced packaging, such ...

Abstract: Selective lateral etching of the SiGe layers is one of the most critical steps in Gate-All-Around Field-Effect Transistor (GAAFET) fabrication, which is the basis for the formation of an ...